Coarse-grained approach to amorphous and anisotropic materials in kinetic Monte Carlo thin-film growth simulations: A case study of TiO2 and ZnO by plasma-enhanced chemical vapor deposition

Jorge Budagosky, Xabier García-Casas, Juan R. Sánchez-Valencia, Ángel Barranco, Ana Borrás Plasma Processes and Polymers 19 (2022) 2270008 DOI: 10.1002/ppap.202270008 The growth of TiO2and ZnO thin films is studied by means of coarse-grained kinetic Monte Carlo...